| Media Monitored | Gas |
| Device Type | Low Pressure Drop |
| Minimum Flow Rate | -200 slm |
| Maximum Flow Rate | 200 slm |
| Supply Voltage | 5 V |
| Pipe Diameter Range | 22 mm |
| Connection Type | 2-Wire I2C |
| Maximum Pressure | 1.3bar |
| Material | Epoxy, Gold, Polyurethane, PPE+PS Blend, Si, Si3n4, Siox, Stainless Steel (Annealed) |
| Minimum Media Temperature | -20 °C |
| Maximum Media Temperature | +80°C |
| Minimum Operating Temperature | -20°C |
| Maximum Operating Temperature | +80°C |
| Series | SFM3000 |
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